Results
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Total HPM Inventory
gallons
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Required Exhaust Volume
CFM
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Sprinkler Design Area
ft²
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Max HPM per Control Area
gallons
Note: NFPA 318 covers fire protection for semiconductor fabrication facilities using hazardous production materials (HPM) including pyrophoric, toxic, and flammable gases/liquids. Exhausted enclosures, gas detection, and emergency shutoff are required. Coordinate with IFC Chapter 27 and NFPA 55 for compressed gas storage.
Reference
NFPA 318 Semiconductor Fab Protection:
Total HPM = HPM/Workstation * Number of Workstations
Exhaust CFM = (Area * Ceiling Height * ACH) / 60
Sprinkler: EH-1 at 0.30 gpm/ft² over 3000-4000 ft² design area
MAQ per control area: 60 gal with approved HPM storage
ACH >= 15 for HPM areas (NFPA 318 Sec 7.3)